Thermal Evaporator Constructor by Embedded System

N Manikandan, S Muruganand, Azha Periyasamy

Abstract


The thermal evaporation method which is most famous method to fabricate the thin film substrate. its one type of physical vapour deposit, In this work the evaporation machine should be controlled by  processor. the total inside temperature and rotator has been connected  With processor and it is parameter has been displayed . A simple substrate heater and its temperature controller were designed and built in order to prepare thin films in a high vacuum deposition system. The substrate heater was elaborated with a glass-ceramic body and a molybdenum foil heater. The applied power and the temperature are regulated by a power controller board using a microcontroller programmed with a proportional-integrative-derivative algorithm. The heater system was tested in a high vacuum deposition system and the results of its characterization at 100, 200°C are presented a variation in temperature.


Keywords


ARM processor, Thermal Evaporator, Motor, heating coil.

References


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